Quantitative Accelerated Life Testing of MEMS Accelerometers
نویسندگان
چکیده
منابع مشابه
Quantitative Accelerated Life Testing of MEMS Accelerometers
Quantitative Accelerated Life Testing (QALT) is a solution for assessing thereliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shownin this paper and an attempt to assess the reliability level for a batch of MEMSaccelerometers is reported. The testing plan is application-driven and contains combinedtests: thermal (high temperature) and mechanical stress. Two variant...
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An optimal layout synthesis methodology for CMOS MEMS accelerometers is presented. It consists of a parametrized layout generator that optimizes design objectives while meeting functional specifications. The behavior of the device is estimated using lumped parameter analytical equations. The design problem is then formulated into a non-linear constrained optimization problem. Such an approach t...
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ژورنال
عنوان ژورنال: Sensors
سال: 2007
ISSN: 1424-8220
DOI: 10.3390/s7112846